| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate inspection device and a substrate inspection method for sensitively inspecting streak defects occurring on striped colored films of an inspecting object substrate. SOLUTION: This substrate inspection device comprises a lighting means for applying light to a horizontal surface of the substrate with groups of striped colored films formed thereon and an imaging means disposed at a position for capturing regular reflection light from the substrate. According to this substrate inspection method, an image of the substrate is taken on condition that an angleθis not less than 40°and not more than 50°, with the angleθformed by a straight line together connecting the lighting means and the imaging means with the direction of stripes with which one colored group among the groups of striped colored films is equipped, and streak defects having occurred on the substrate are detected from the taken image. COPYRIGHT: (C)2008,JPO&INPIT
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