| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating apparatus and a die head cleaning method of the apparatus by which even when a foreign substance is firmly stuck on the wall surface of a manifold, the foreign substance is simply removed and the inside of a die head is sufficiently cleaned with a small quantity of a cleaning liquid in a short time. SOLUTION: A turbulent flow having Reynolds Number of ≥2,000 is generated in the manifold 102 by supplying the cleaning liquid to the manifold 102 at a flow rate of ≥1,000 cc/min from a cleaning liquid supply pump 302 in a state the supply of a coating liquid to the manifold 102 of the die head 10 from a coating liquid supply apparatus 20 is stopped and the inside of the manifold 102 and the inside of a discharge slit 103 are cleaned with the turbulent flow. COPYRIGHT: (C)2008,JPO&INPIT |
