| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress the generation of pitching, even when there is a deviation between the position of the barycenter of a stage and the position of installation of a linear motor. <P>SOLUTION: This stage device has the stage, a plurality of linear motors for driving the stage in a horizontal direction, and a control section for controlling the linear motors. Each of the plurality of linear motors is disposed so as to be superimposed, and the control section controls the linear motors so that moment, generated on the stage, can be reduced by the thrust force to be given to the stage by each of the linear motors. <P>COPYRIGHT: (C)2008,JPO&INPIT |
