Si-O CONTAINING HYDROGENATED CARBON FILM, OPTICAL DEVICE INCLUDING THE SAME, AND METHOD FOR MANUFACTURING THE Si-O CONTAINING HYDROGENATED FILM AND THE OPTICAL DEVICE

摘要

A Si-O containing hydrogenated film as an optical film is characterized in having a refractive index within a range of 1.48 or more but not more than 1.85 to light having a wavelength of 520nm and an extinction coefficient of less than 0.15 to light having a wavelength of 248nm, and that the refractive index and the extinction coefficient are reduced when receiving energy beam irradiation. Various types of optical elements and optical devices including the optical elements are provided by using such Si-O containing hydrogenated carbon film.