| 摘要 |
PROBLEM TO BE SOLVED: To form a coil into a vertical shape while preventing coil pattern error and penetration. SOLUTION: This method includes step S4 of forming a resist layer on a surface where a coil is to be formed, the resist layer processing step S5 of forming a spiral opening extended spirally according to the shape of the coil, and a recess extended along an outermost periphery outside the outermost periphery of the opening and having a depth to prevent exposure of the surface where the coil is formed, step S6 of applying heat treatment or ultraviolet ray irradiation to the resist layer including the opening and the recess, step S7 of forming a coil in the opening of the resist layer subjected to the heat treatment or the ultraviolet ray irradiation, and step S8 of removing the resist layer after the coil is formed. COPYRIGHT: (C)2008,JPO&INPIT
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