| 摘要 |
<p>The invention relates to a method for determining intensity distribution in the focal plane (6) of a projection exposure arrangement, wherein a large aperture imaging system (7, 8) is emulated and a light from a sample is represented on a local resolution detector by means of an emulation imaging system. A device for carrying out said method and emulated devices are also disclosed. Said invention makes it possible to improve a reproduction quality since the system apodisation is taken into consideration. The inventive method consists in determining the integrated amplitude distribution in an output pupil, in combining said integrated amplitude distribution with a predetermined apodisation correction and in calculating a corrected apodisation image according to the modified amplitude distribution.</p> |
