发明名称 |
Method for preparing yttria parts and plasma reactor parts comprising yttria |
摘要 |
<p>A method of fabricating yttria parts is provided herein. In one embodiment, the method includes sintering a yttria sample, machining the sintered sample to form a part, and annealing the part by heating the part at a predetermined heating rate, maintaining the part at a constant annealing temperature, and cooling the part at a predetermined cooling rate.</p> |
申请公布号 |
EP1921053(A1) |
申请公布日期 |
2008.05.14 |
申请号 |
EP20070018393 |
申请日期 |
2007.09.19 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
RYABOVA, ELMIRA;LEWINGTON, RICHARD;CHANDRACHOOD, MADHAVI R.;SABHARWAL, AMITABH;BIVENS, DARIN;SUN, JENNIFER;YUAN, JIE |
分类号 |
C04B35/64;C04B35/505;H01J37/00 |
主分类号 |
C04B35/64 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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