| 摘要 |
<p>A cross-sectional specimen preparation apparatus and method using an ion beam (IB) and a shielding material (12) and permitting quick and easy judgment of the progress of ion beam milling. The milling position can be modified or corrected in a short time. Also, the internal structure of the specimen (6) can be known. The apparatus has an optical observation device (40) for observing a cross section of the specimen milled by the ion beam. During ion beam irradiation or when the irradiation is interrupted, a shutter (41) is opened. The cross section of the specimen can be observed while maintaining the vacuum inside a processing chamber (18). The apparatus further includes an adjusting mechanism (5,10) for varying the relative position between the specimen and the shielding material. Whenever one sectioning operation ends, an image of the cross section is accepted and the milling position is moved an incremental distance. These operations are repeated. A three-dimensional image of the specimen is constructed from obtained plural images.</p> |
