Method of manufacturing an injector plate

摘要

A method of manufacturing an injector plate is provided where a wafer is provided and a release layer is disposed on the wafer. Then a photo resist is formed over the release layer. After photolithography processing, a plurality of plugs are formed from the photo resist. A titanium layer is sputtered on the release layer and on the plurality of plugs. The plugs are removed so that the titanium layer has a plurality of openings. An injector plate fabricated from this method has the characteristics of biocompatibility with a plurality of fine-pitch openings with uniform diameters.