| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To perform machining with high machining quality concerning a beam irradiation method and apparatus for irradiating a workpiece with a laser beam. <P>SOLUTION: (a) A pulsed laser beam, which is made incident by forming an irradiation region of a first shape, is emitted in a plurality of shots into a machining region, while the irradiation position is shifted so that the incident region is partly overlapped, and in a manner that the entire machining region is fully irradiated and that no irradiation region of the pulsed laser beam protrudes outside the machining region. (b) Within the machining region, in a short region in which the number of shots of the pulsed laser beam is short in the process (a), there is emitted a pulsed laser beam which is made incident by forming an irradiation region of a second shape corresponding to the shape of the short region. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
