BUBBLE SUPPRESSING FLOW CONTROLLER WITH ULTRASONIC FLOW METER

摘要

An apparatus for the, delivery of slurry, solution comprising an ultrasonic flow meter (303) positioned between a fluid preparation manifold and a slurry delivery arm, and a shutoff valve (307) positioned between a proportional valve (305) and the slurry delivery arm. Also, an apparatus for the delivery of, slurry solution including an ultrasonic flow meter positioned to receive fluid from a fluid preparation manifold, a proportional valve and stepper motor in communication with the flow meter, and a reverse flow restrictor in communication with the proportional valve and a slurry delivery arm.