CLASSIFYING FAULTS ASSOCIATED WITH A MANUFACTURING PROCESS
摘要
Faults that are associated with a set of variables that are each associated with a manufacturing parameter are classified. A fault vector is defined according to a multivariate analysis based on a contribution to a metric of a subset of the variables. The fault vector is compared to a plurality of previously-defined fault vectors to determine a comparison value indicative of a correlation between the fault vector and the plurality of previously-defined fault vectors. The fault vector is associated with at least one of a first set of fault vectors indicative of a known fault or a second set of fault vectors indicative of an unknown fault based in part on the comparison value.
申请公布号
WO2007146558(A3)
申请公布日期
2008.05.08
申请号
WO2007US69457
申请日期
2007.05.22
申请人
MKS INSTRUMENTS, INC;HENDLER, LAWRENCE;LEV-AMI, UZI, JOSEF