| 摘要 |
PROBLEM TO BE SOLVED: To provide a foreign matter detection method and a foreign matter detecting device, capable of detecting the presence of foreign matters on the stage of a droplet discharge device or on a work, and to provide the droplet discharge device. SOLUTION: This foreign matter detection method includes a step A, where a light flux 22 emitted from a light source 14 repeats reflection between two facing reflecting surfaces 12a, 13a which are vertical to a surface 11a and mutually parallel, propagates approximately in parallel with the surface 11a, and covers at least a part of the surface 11a; a step B for receiving the light flux 22; and a step C for determining the presence of foreign matters on at least a part of the surface 11a, based on the intensity of the light flux 22 received. COPYRIGHT: (C)2008,JPO&INPIT
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