| 摘要 |
<p>Ni-based refractory metallic glass coatings utilizing periodic table grou p five element vanadium in combination with other group 5 or 6 elements, par ticularly tantalum, chromium, or molybdenum, can be formed via co-sputtering with proper control of carrier gas pressure and/or bias voltage. The alloy forms fully amorphous coatings that are not predicted by the usual glass for ming ability (GFA) criteria. These alloys exhibit high thermal stability, ha rdness values greater than TiN, smooth surface finishes, and a wide processi ng window.</p> |
