发明名称 |
Collector mirror exchanging apparatus and method for extreme ultraviolet light source apparatus |
摘要 |
A collector mirror exchanging apparatus capable of safely and easily exchanging a collector mirror for collecting extreme ultra violet light emitted from plasma generated within a chamber of an extreme ultra violet light source apparatus. The collector mirror exchanging apparatus includes: a supporting base for supporting a collector mirror or a collector mirror structure; and a guiding rail disposed on the supporting base and regulating a moving direction of the collector mirror or the collector mirror structure; wherein at least the collector mirror is taken out of the chamber by moving the collector mirror or the collector mirror structure along the guiding rail on the supporting base.
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申请公布号 |
US2008104828(A1) |
申请公布日期 |
2008.05.08 |
申请号 |
US20070979513 |
申请日期 |
2007.11.05 |
申请人 |
SOMEYA HIROSHI;ABE TAMOTSU;SUGANUMA TAKASHI;HOSHINO HIDEO;SUMITANI AKIRA |
发明人 |
SOMEYA HIROSHI;ABE TAMOTSU;SUGANUMA TAKASHI;HOSHINO HIDEO;SUMITANI AKIRA |
分类号 |
B23P21/00 |
主分类号 |
B23P21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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