| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating device where, even in the case a material to be treated such as a porous material is coated with a film, the sticking of contamination in the film can be easily reduced. SOLUTION: Regarding the coating device 1 where a target T is arranged so as to be confronted with the surface to be treated in a porous material PW, and voltage is applied at least to the porous material PW in order to coat the treatment surface in the porous material PW with the particles of the target T, the coating device 1 is at least provided with a shielding member 15 for shielding the passage of ions and the above particles at a position confronted with the target T via the porous material PW, and the shielding member is grounded. COPYRIGHT: (C)2008,JPO&INPIT
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