| 摘要 |
PROBLEM TO BE SOLVED: To prevent position displacement of retainers by positively using a characteristic in which the retainers move the half of a moving distance of a table. SOLUTION: A retainer position displacement prevention device is provided with a position displacement regulator 24 which has stoppers 22a-22d for regulating the positions of the retainers 14, 15 and is movable in response to the movement of the table 11, a magnet plate array 20 of a linear motor for driving a movable body, which forms a linear motor feeding mechanism of the table 11 and is arranged in parallel to guide surfaces 12, 13 and a linear motor mechanism for moving the position displacement regulator 24 in the same direction with the movement of the table, and control the regulator 24 so that it moves in synchronization with the movement of the movable body at a speed half of the movable body. COPYRIGHT: (C)2008,JPO&INPIT
|
