| 摘要 |
A MEMS comb device including a stationary comb fixed on a substrate, a movable comb separated from the substrate, and a spring movably supporting the movable comb. The stationary comb includes a stationary stage, and a plurality of stationary fingers protruding from the stationary stage and arranged in a plurality of layers which are separated at different intervals from the stationary stage. The movable comb includes a movable stage, and a plurality of movable fingers protruding from the movable stage and arranged in a plurality of layers which are separated at different intervals from the stationary stage. The plurality of stationary fingers and the plurality of movable fingers are arranged to correspond to each other according to a reverse order relationship between layers of the stationary fingers and the movable fingers, and the plurality of stationary fingers and the plurality of movable fingers that correspond to each other are arranged alternately with each other.
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