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发明名称
SYSTEM AND METHOD FOR CALIBRATION OF A FLOW DEVICE
摘要
申请公布号
EP1779073(A4)
申请公布日期
2008.05.07
申请号
EP20050785769
申请日期
2005.08.12
申请人
ENTEGRIS, INC.
发明人
LAVERDIERE, MARC;MCLOUGHLIN, ROBERT;NIERMEYER, J., KARL
分类号
G01F25/00;G05B15/00
主分类号
G01F25/00
代理机构
代理人
主权项
地址
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