| 摘要 |
An apparatus for sequentially testing a semiconductor is provided to test sequentially a plurality of semiconductor chip or modules according as a test function is added, by separating a test pattern data generating function from a test pattern data testing function. A test pattern generating module(200) generates test pattern data. At least two test performing modules(300a,300b) receive the test pattern data from the test pattern generating module or another test pattern generating module, perform a DUT(device under test) and generate test result data of the DUT. The test pattern generating module can include a test pattern data generating part(210) and a test pattern generation module communicating interface part(290). The test pattern data generating part generates the test pattern data. The test pattern generation module communicating interface part communicates test data including the test pattern data or the test result data with the test performing module.
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