发明名称 Method for measuring information transfer limit in transmission electron microscope, and transmission electron microscope using the same
摘要 <p>A crystal thin film is adopted as a specimen for measurement. A change in the contrast of crystal lattice fringes is measured under a condition that a diffracted wave and other wave are caused to'interfere with each other. Thus, an information transfer limit of a transmission electron microscope can be measured quantitatively. Since the measurement is performed with a condition for interference restricted, the information transfer limit of the transmission electron microscope can be quantitatively assessed.</p>
申请公布号 EP1918964(A2) 申请公布日期 2008.05.07
申请号 EP20070021038 申请日期 2007.10.26
申请人 HITACHI, LTD. 发明人 YOSHIDA, TAKAHO
分类号 H01J37/26;H01J37/28 主分类号 H01J37/26
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