APPARATUS FOR INSPECTING ALIGNMENT FILM OF LIQUID CRYSTAL DISPLAY AND METHOD THEREOF

摘要

An apparatus and a method for inspecting an alignment film of a liquid crystal display are provided to improve detection performance of alignment film defects by increasing dispersion of light. An apparatus for inspecting an alignment film of a liquid crystal display includes an illumination apparatus(10), a charge coupled device(20), an image processor(40), and a transfer device(30). The illumination apparatus is spaced apart from a substrate(100) on which an alignment film(11) is formed. The charge coupled device is spaced apart from the illumination apparatus. The image processor is connected to the charge coupled device. The transfer device mounts the substrate thereon to convey the substrate. The image processor checks defects of the alignment film using an image generated by the charge coupled device.