发明名称 Interposers for chip-scale packages and intermediates thereof
摘要 A carrier substrate, or interposer, for use in a chip-scale package includes a material, such as a semiconductive material, that has a coefficient of thermal expansion that is the same or similar to that of the semiconductor device to be secured thereto. The interposer may also include a rerouting element laminated over the remainder of the interposer and including one or more dielectric layers, as well as a conductive layer for rerouting the bond pad locations of a semiconductor device with which the interposer is to be assembled. The interposers may be fabricated on a "wafer scale." Accordingly, a semiconductor device assembly may include a first, semiconductor device-carrying substrate and a second, interposer-comprising substrate. Regions of the second substrate that comprise the boundaries between adjacent interposers may be thinner than other regions of the second substrate, including the regions from which the interposers are formed.
申请公布号 US7368812(B2) 申请公布日期 2008.05.06
申请号 US20050249540 申请日期 2005.10.13
申请人 MICRON TECHNOLOGY, INC. 发明人 AKRAM SALMAN
分类号 H01L23/02;G01R1/073;H01L21/60;H01L21/768;H01L23/14;H01L23/31;H01L23/498 主分类号 H01L23/02
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