MICROSCOPIC DEVICE AND MICROSCOPIC IMAGE ANALYSIS METHOD

摘要

[PROBLEMS] To provide a microscopic device capable of resolving a fine pattern exceeding the logical resolution of a microscopic device and a resolution inspection method. [MEANS FOR SOLVING PROBLEMS] A microscopic device includes: a solid-state imaging element having a plurality of pixels; an enlarging optical system for forming an enlarged image of at least a part of an object to be observed on the pixels; and image processing means which applies an edge emphasis filter having a differentiation effect obtained by the solid-state imaging element so as to obtain a edge-emphasized image corresponding to the image. The enlarging optical system includes a magnification-variable optical system which forms a linear portion contained in the observation region of the object surface of the object to be observed, as an image having a width which exceeds the size of the respective images constituting the solid-state imaging element and is not greater than the width of the processing area by the edge emphasis filter.