发明名称 THREE DIMENSIONAL MICROSTRUCTURES AND METHODS FOR MAKING THREE DIMENSIONAL MICROSTRUCTURES
摘要 Systems and methods for depositing a plurality of droplets in a three-dimensional array are disclosed. The array can comprise a first type of droplets disposed to form a support structure and a second type of droplets forming a conductive seed layer on the support structure. A structure material can be electrodeposited onto the seed layer to create a three-dimensional structure.
申请公布号 WO2007075998(A3) 申请公布日期 2008.05.02
申请号 WO2006US48989 申请日期 2006.12.19
申请人 FORMFACTOR, INC.;MATHIEU, GAETAN, L.;FANG, TRELIANT;HOBBS, ERIC D. 发明人 MATHIEU, GAETAN, L.;FANG, TRELIANT;HOBBS, ERIC D.
分类号 H01L21/20 主分类号 H01L21/20
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