THREE DIMENSIONAL MICROSTRUCTURES AND METHODS FOR MAKING THREE DIMENSIONAL MICROSTRUCTURES
摘要
Systems and methods for depositing a plurality of droplets in a three-dimensional array are disclosed. The array can comprise a first type of droplets disposed to form a support structure and a second type of droplets forming a conductive seed layer on the support structure. A structure material can be electrodeposited onto the seed layer to create a three-dimensional structure.
申请公布号
WO2007075998(A3)
申请公布日期
2008.05.02
申请号
WO2006US48989
申请日期
2006.12.19
申请人
FORMFACTOR, INC.;MATHIEU, GAETAN, L.;FANG, TRELIANT;HOBBS, ERIC D.