发明名称 COMPENSATION OF EFFECTS OF ATMOSPHERIC PERTURBATIONS IN OPTICAL METROLOGY
摘要 <p>In general, in a first aspect, the invention features a method that includes using an interferometry assembly to provide three different output beams, each output beam including an interferometric phase related to an optical path difference between a corresponding first beam and a corresponding second beam, each first beam contacting a measurement object at least once, monitoring the interferometric phases for each of the three different output beams, and deriving information about variations in the optical properties of a gas in the first beam paths from the three monitored phases.</p>
申请公布号 WO2008051232(A2) 申请公布日期 2008.05.02
申请号 WO2006US43494 申请日期 2006.11.08
申请人 ZYGO CORPORATION;HILL, HENRY A. 发明人 HILL, HENRY A.
分类号 G01N21/00 主分类号 G01N21/00
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