| 摘要 |
PROBLEM TO BE SOLVED: To provide a board inspection device and a board inspection method capable of surely conducting inspection corresponding to displacement of a point for inspection on each unit board of a mother board. SOLUTION: For a mother board 1 wherein a plurality of lines and a plurality of rows of unit boards 2 for inspection are arranged in matrix, the inspection is conducted for evry row using an inspection tool unit 21 with a plurality of probe groups 22 arranged in a line. More specifically, the position of the inspection point 3 of each unit board 2 involved in each row of the mother board 1 is detected, then the positioning of the mother board 1 with the inspection jig 21 is performed based on the detection results for inspection. COPYRIGHT: (C)2008,JPO&INPIT
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