| 摘要 |
<P>PROBLEM TO BE SOLVED: To achieve a reticle stage capable of correcting the surface shape of a reticle without damaging the reticle, and to achieve a method of correcting the surface shape of the reticle. <P>SOLUTION: The reticle stage has: a stage body 11 having a window section 11a for transmitting light to the center section; and movable chuck sections 12 provided at both the sides of the window section 11a in the stage body 11. The movable chuck section 12 has a holding surface 12a for holding the reticle, and can adjust inclination to the reference surface of the holding surface 12a. <P>COPYRIGHT: (C)2008,JPO&INPIT |
