| 发明名称 |
DEFECT INSPECTION METHOD AND APPARATUS |
| 摘要 |
A method of inspecting patterns to detect a defect of the patterns by using information of a scattered diagram of brightness of said first and second images.
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| 申请公布号 |
US2008101685(A1) |
申请公布日期 |
2008.05.01 |
| 申请号 |
US20070858215 |
申请日期 |
2007.09.20 |
| 申请人 |
MAEDA SHUNJI;OKA KENJI;SHIBATA YUKIHIRO;YOSHIDA MINORU;SHISHIDO CHIE;TAKAGI YUJI;YOSHIDA ATSUSHI;YAMAGUCHI KAZUO |
发明人 |
MAEDA SHUNJI;OKA KENJI;SHIBATA YUKIHIRO;YOSHIDA MINORU;SHISHIDO CHIE;TAKAGI YUJI;YOSHIDA ATSUSHI;YAMAGUCHI KAZUO |
| 分类号 |
G06K9/00;G01N21/95;G01N21/956;G06T7/00 |
主分类号 |
G06K9/00 |
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