发明名称 ARRANGEMENT OF TWO CONNECTED BODIES
摘要 Arrangements of a first body and a second body connected to the first body, as well as related systems and methods, are disclosed. The arrangements, systems and methods can be used, for example, with optical devices, such as in the field of microlithography systems used to manufacture of microelectronic devices.
申请公布号 US2008100815(A1) 申请公布日期 2008.05.01
申请号 US20070842313 申请日期 2007.08.21
申请人 CARL ZEISS SMT AG 发明人 HOLDERER HUBERT;EKSTEIN CLAUDIA
分类号 G03B27/54;B23P11/00 主分类号 G03B27/54
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