Flat glass substrate's i.e. flat glass-plate, waviness determining method for manufacturing thin film transistor display, involves integrating deflecting values over measuring point for computing position and height of local deformations

摘要

The method involves optically determining deflection of light rays transmitted by a flat glass substrate e.g. flat glass plate, having sides (10, 11), in a contactless manner at local deformations of the surface of the substrate. Position and height of the local deformations are quantitatively determined based on the determined deflection or a measured variable. The deflecting values or values derived from the deflecting values are integrated over a measuring point for computing the position and height of the local deformations. An independent claim is also included for a device for determining of the Waviness of flat glass substrates.