| 摘要 |
An apparatus and method for peeling, and an apparatus and method for laminating which are preferable to reduce the overall size of the apparatus are provided. When a transport means 8 transports a wafer W with glass plate G, and a holding roller 2, in synchronization with the transportation, rotates around its central axis, the holding roller 2 contacts the wafer W to peel it and hold it thereon, and after the peeling is completed, the transport means 8 transports a ring frame F in a direction opposite to the direction for peeling. In synchronization with the transportation, the holding roller 2 rotates around its central axis in a direction opposite to the direction for peeling, so that the holding roller 2 sticks the wafer W held on the holding roller to the ring frame F by means of a dicing tape T2. |
