| 摘要 |
<p>A bio-sensor is provided to detect biological materials by detecting changes of contact resistance between the signal wire and contact electrode when the biological material is adsorbed to a receptor coating layer. A method for manufacturing the bio-sensor is also provided to remove the size of bio-sensor by manufacturing it without mechanical connections. A bio-sensor for detecting biological materials comprises: a supporting part(100); a penetration hole(150) for penetrating the supporting part; a floating part(110) connected to the supporting part and floated at the penetration hole; actuators(171, 172) for bending the floating part; a contact electrode located above the floating part; a receptor coating layer formed above the contact electrode; a signal wire(200) above the receptor coating layer and fixed to the supporting part; and first and second ground wires(220) separated from the both sides of signal wire and floating above the supporting part, wherein both ends of the ground wires are fixed to the supporting part. Further, the floating part contains a first connecting part, a second connecting part, a contacting electrode reaching part, a first hinge and a second hinge.</p> |
