| 摘要 |
A method of establishing at least one marking element on a substrate ( 1 ). By means of design data of the substrate ( 1 ) at least a fictitious marking element ( 5 ) on the substrate ( 1 ) is determined. The fictitious marking element ( 5 ) should then be unique for a predefined area of the substrate ( 1 ). The fictitious marking element is obtained by selecting at least two transitions ( 6, 7, 17, 18 ) of at least one element on the substrate while the transitions ( 6, 7, 17, 18 ) enclose an angle to each other.
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