| 摘要 |
FIELD: chemistry. ^ SUBSTANCE: industrial silicon with industrial methanol react in the presence of a catalyst at high temperature. From the products of the reaction, hydrogen-containing methoxysilane in a mixture with tetramethoxysilane is separated. Monosilane is obtained through catalyst disproportioning of hydrogen-containing methoxysilanes, and cleaned through adsorption on active carbon. Temperature fall between the stages of separating hydrogen-containing methoxysilanes and subsequent catalyst disproportioning does not decrease by less than 60°C. Purifying monosilane from carbon-containing impurities is done through throttle discharge of monosilane from high pressure of 60 kg/cm2 to low pressure of 1-3 kg/cm2, providing for lowering temperature of gaseous monosilane with impurities to temperature not higher than minus 10°C and formation of a dispersed phase of tetramethoxysilane. Through hydrolysis of tetramethoxysilane, silicon dioxide is obtained, which is reduced to silicon and returned to the stage of direct synthesis of trimethoxysilane. ^ EFFECT: lower content of carbon-containing impurities in monosilane and low consumption of raw materials and energy. ^ 2 ex |
