| 摘要 |
<p>The present invention provides a corrosion-resistant metal made sensor for fluid and a fluid supply device for which the sensor is employed. This has made it possible that the corrosion resistance of a thermal type mass flow rate sensor is raised, and also that the measurement accuracy to the pressure changes is stabilized, responsivity is enhanced, particle-free is achieved, unevenness in product quality is prevented, and pressure is measured. More specifically, the corrosion-resistant metal made sensor for fluid is equipped with a corrosion-resistant metal substrate 2, a mass flow rate sensor part 1 comprising a corrosion resistant metal substrate 2, a thin film forming a temperature sensor 3a and a heater 3b mounted on the back face side of the fluid contacting surface of the corrosion-resistant metal substrate, and a pressure sensor part 4 comprising a thin film forming a strain sensor element 4a mounted on the back face side of the fluid contacting surface of the corrosion-resistant metal substrate 2, and it is so constituted that the mass flow rate and pressure of the fluid are measured.</p> |
