| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a substrate supporting stage capable of correctly reproducing the profile configuration of the substrate supporting stage at a low cost and capable of forming an air nozzle without requiring a high technology and high cost, further, capable of preventing the breakage of the stage or the come-off of a jig caused by the difference of an amount of expansion even if there is a temperature change. <P>SOLUTION: The substrate supporting stage 12 supports a substrate by levitating the substrate at a predetermined height by air jetted out of a plurality of air nozzles 20 having an opening at the upper surface thereof in a substrate treatment device which treats the substrate sequentially while conveying the substrate into a given direction. This stage is formed by molding a material including an aggregate, a binder and a filler. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
