发明名称 SEMICONDUCTOR DEVICE
摘要 Provided is a semiconductor device including a bonding pad allowing a probe contact region and a bonding region to be clearly distinguished and thereby controlled. The semiconductor device includes the bonding pad and a slit via region provided to a lower layer of the bonding pad. The slit via region includes a first region on which a plurality of slit vias are disposed in parallel, and a second region including at least one slit via. The width of the slit via of the first region is smaller than that of the slit via of the second region.
申请公布号 US2008083923(A1) 申请公布日期 2008.04.10
申请号 US20070869025 申请日期 2007.10.09
申请人 NEC ELECTRONICS CORPORATION 发明人 NAKAUCHI OSAMU
分类号 H01L23/58 主分类号 H01L23/58
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