| 摘要 |
PROBLEM TO BE SOLVED: To provide a hydrogen sensor hardly generating a crack caused by thermal stress, wherein a metal is not mutually diffused between an electrode and a detection film, and having high durability. SOLUTION: This hydrogen sensor has a substrate; the detection film comprising a rare earth metal formed on the substrate; a protection film formed by dispersing hydrogen-permeable metal particles in a ceramics material, which is a protection film formed on the detection film; and a pair of electrodes formed separately on the protection film, and connected electrically to the detection film through the protection film. The hydrogen-permeable metal particles are Pd, Pt, Nb, V and Ta, and each preferable content thereof is 20-70 mass%. A resistance value in the inter-electrode direction of the protection film is 10-100,000Ω, and the resistance value in the inter-electrode direction of the detection film is preferably a smaller value than the resistance value in the inter-electrode direction of the protection film. COPYRIGHT: (C)2008,JPO&INPIT |
