SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor device which suppresses the generation of a bird's beak in a floating gate, and its manufacturing method. SOLUTION: The semiconductor device is equipped with a semiconductor substrate 2; element separating structures 8 formed in a groove formed on the semiconductor substrate 2 through a semiconductor oxide film 7; a floating gate 4 formed on the semiconductor substrate 2 between the element separating structures 8 through an insulating film 3; a gate oxidation preventing film 6 formed on the side surface of the element separating structure 8 for the floating gate 4 so that a part of the side surface and a bottom surface are contacted with the insulating film 3; a control gate 10 formed on the floating gate 4 through the intergate insulating film 9. COPYRIGHT: (C)2008,JPO&INPIT