| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor substrate that uses a piezoelectric element, and simultaneously and accurately detects the variations in adsorbed mass of a substance to be detected and variations in the optical characteristics that accompany therewith. SOLUTION: The sensor substrate is made up by stacking a clad layer, a core layer and a sensing layer, in this order, on at least one surface of a substrate which is made of a piezoelectric material and has electrodes formed on its both sides, and the electrodes of the sensor substrate act as electrodes of a vibrator, the core layer that constitutes an optical waveguide serves as a main waveguide region. A compound sensor that uses the sensor substrate is also provided. COPYRIGHT: (C)2008,JPO&INPIT
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