摘要 |
<P>PROBLEM TO BE SOLVED: To efficiently inspect an active matrix substrate applied to an electro-optical device (organic EL device or the like). <P>SOLUTION: A power supply 803 and an ammeter 901 are connected to a scanning line driver 200, and a power supply 804 and an ammeter 902 are connected to a data line pre-charge circuit 350. All the scanning lines are made high-level by a scanning line drive control circuit 230 in the scanning driver 200. Also, a predetermined test voltage (VDATA) is supplied to all the data lines through a pre-charge transistor (M10) in the data line pre-charge circuit 359. When a current deviating from an allowable value is measured by the ammeter 901 even after a predetermined charging period has passed, it is determined that a short-circuit failure occurs. Existence of a short-circuit failure among the data lines and that of a defect of holding capacitance Ch can be determined in the same way. <P>COPYRIGHT: (C)2008,JPO&INPIT |