FERROELECTRIC VARACTORS SUITABLE FOR CAPACITIVE SHUNT SWITCHING AND WIRELESS SENSING
摘要
A ferroelectric varactor suitable for capacitive shunt switching is disclosed. High resistivity silicon with a SiO<SUB>2</SUB> layer and a patterned metallic layer deposited on top is used as the substrate. A ferroelectric thin-film layer deposited on the substrate is used for the implementation of the varactor. A top metal electrode is deposited on the ferroelectric thin-film layer forming a CPW transmission line. By using the capacitance formed by the large area ground conductors in the top metal electrode and bottom metallic layer, a series connection of the ferroelectric varactor with the large capacitor defined by the ground conductors is created. The large capacitor acts as a short to ground, eliminating the need for vias. In one embodiment, the varactor shunt switch can be used as passive sensor with the capability of being wireless.
申请公布号
WO2008043001(A2)
申请公布日期
2008.04.10
申请号
WO2007US80375
申请日期
2007.10.04
申请人
UNIVERSITY OF DAYTON;SUBRAMANYAM, GURU;VOROBIEV, ANDRE;GEVORGIAN, SPARTAK