| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress a measurement error of a position of an alignment mark provided on a work piece mounted on a stage to be conveyed. <P>SOLUTION: A positional error of a stage 14 with respect to a normal position is measured at the time of photographing alignment marks 18A, 18B, 18C, 18D, 18E, 18F provided on a work piece 12 by CCD cameras 34A, 34B, 34C; and according to the measurement result, calculation results of positions of the alignment marks 18A, 18B, 18C, 18D, 18E, 18F at the time of photographing calculated by images photographed by the CCD cameras 34A, 34B, 34C are corrected. <P>COPYRIGHT: (C)2008,JPO&INPIT |
