发明名称 FILM-FORMING COMPOSITION, INSULATING FILM, AND ELECTRONIC DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a film-forming composition with a cage structure that has a low dielectric constant and stability without aged deterioration, to provide an interlayer insulating film for an electronic device that is obtained by using the film-forming composition, and to provide an electronic device that has the interlayer insulating film as a layer-constituting layer. SOLUTION: The film-forming composition includes a compound having a cage structure and a compound having a conjugated-diene structure. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008085073(A) 申请公布日期 2008.04.10
申请号 JP20060263358 申请日期 2006.09.27
申请人 FUJIFILM CORP 发明人 HIRAOKA HIDETOSHI
分类号 H01L21/312;H01L21/768;H01L23/522 主分类号 H01L21/312
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