发明名称 |
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device in which a conventional low-power-consumption SOI device and a high-withstand-voltage transistor are formed on the same SOI substrate and to provide its manufacturing method. SOLUTION: The SOI substrate including a silicon substrate layer, an insulating layer formed on the silicon substrate layer and a semiconductor layer formed on the insulating layer is prepared. At least one first transistor which has its operation active region in the silicon substrate layer of the SOI substrate and at least one second transistor which has its operation active region in the semiconductor layer of the SOI substrate are formed. COPYRIGHT: (C)2008,JPO&INPIT
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申请公布号 |
JP2008085138(A) |
申请公布日期 |
2008.04.10 |
申请号 |
JP20060264582 |
申请日期 |
2006.09.28 |
申请人 |
OKI ELECTRIC IND CO LTD;MIYAGI OKI ELECTRIC CO LTD |
发明人 |
YAJIMA TSUKASA |
分类号 |
H01L21/8234;H01L21/336;H01L21/762;H01L27/08;H01L27/088;H01L29/786 |
主分类号 |
H01L21/8234 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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