| 摘要 |
PROBLEM TO BE SOLVED: To realize a semiconductor testing apparatus capable of surely fixing a performance board to a test head. SOLUTION: The apparatus comprises: the test head 2; the performance board 1; a locking detecting circuits 1-1 to 1-4 for detecting such the engaged states that performance board locking pins 2-1 to 2-4 engage with locking pin engaging blocks 1-6 to 1-9, and for outputting lock signals representing the engaged states; and a sequence control circuit 4. The performance board 1 is equipped with a control line output connector 1-10 for receiving the lock signals. The test head 2 is equipped with a lock signal receiving connector 2-5 for receiving the lock signals from the control line output connector 1-10. The sequence control circuit 4 receives the lock signals via the lock signal receiving connector 2-5 when all the lock signals of the locking detecting circuits 1-1 to 1-4 are received by the control line output connector 1-10. COPYRIGHT: (C)2008,JPO&INPIT
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