| 摘要 |
PROBLEM TO BE SOLVED: To provide an adhesion preventive body in a vacuum film deposition system where maintenance and installation can be easily performed, and further, the degree of freedom in the installation can be increased, and to provide a vacuum film deposition system. SOLUTION: The vacuum film deposition system includes: a sheet-shaped member 71 for shielding the evaporation particles of an evaporation flow A missed from a workpiece W, and checking the adhesion of the evaporation particles to the inner wall and/or components in a vacuum chamber 2; and a sheet holding part 101 for holding the sheet-shaped member 71 inside the vacuum chamber 2. The sheet-shaped member 71 has flexibility, and further has a property of easily adhering to the evaporation particles. COPYRIGHT: (C)2008,JPO&INPIT
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