| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate inspection device for shortening a required time in a preparatory stage by suppressing a manufacturing cost. SOLUTION: The substrate inspection device includes: relatively positioning a moving probe block 10 of a rear row to probe blocks 9 and 10 of a front row by a positioning mechanism 20; being compared with a case or the like that the other entire moving probe block 10 is positioned by regarding a prescribed fixed probe block 9 as a reference to simplify the positioning mechanism 20; suppressing the manufacturing cost of the substrate inspection device 1; shortening a moving distance of the moving probe block 10; and shortening the required time in the preparatory stage for positioning each moving probe block 10 in response to a substrate 2. COPYRIGHT: (C)2008,JPO&INPIT
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