发明名称 |
IMPROVED DISPLACEMENT SENSOR |
摘要 |
An apparatus and method for detecting multiple beams from a beamsplitter is disclosed. Some embodiments of the present invention are particularly well-suited for use in microphones, high-sensitivity pressure sensors, vibration sensors, and accelerometer applications. Some embodiments of the present invention generate a differential electrical output signal that is based on multiple detected optical signals. The differential output signal is generated in response to an environmental stimulus, such as a pressure differential or incident acoustic energy. In accordance with the illustrative embodiment, an optical displacement sensor redirects the transmitted beam back through the optically-resonant cavity with an angular offset. Due to the angular offset, the redirected beam (i.e., retransmitted beam) transits the cavity with an intra-cavity path length that corresponds to substantially full transmittance of the retransmitted beam in the absence of the environmental stimulus. |
申请公布号 |
WO2007143362(A3) |
申请公布日期 |
2008.04.10 |
申请号 |
WO2007US69176 |
申请日期 |
2007.05.17 |
申请人 |
SYMPHONY ACOUSTICS, INC.;CARR, DUSTIN, WADE;HELM, JAMES, GILBERT |
发明人 |
CARR, DUSTIN, WADE;HELM, JAMES, GILBERT |
分类号 |
G01D5/26;H04R23/00 |
主分类号 |
G01D5/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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